Event Title
Evaluation of Thin Film Coating Adhesion with Michelson Interferometer
Faculty Mentor
Sanichiro Yoshida
Location
Orchestra Room, Angelle Hall
Start Date
12-4-2014 10:45 AM
End Date
12-4-2014 11:45 AM
Description
An opto-acoustic technique has been applied to evaluate the adhesion strength of a thin-film (Au/Ti, Pt/Ti or Ti) coating on silicon wafers. The specimens have been configured with a Michelson Interferometer as the end mirrors, and are driven from rear with an acoustic transducer so that the specimen oscillates parallel to optical axis at frequencies ranging from 2 kHz – 30 kHz. The resulting film surface displacement has been detected as a fringe shift of the interference intensity pattern behind the beam splitter with a digital imaging system. The difference in adhesion strength between two types of specimens has been successfully visualized as the difference in the fringe contrast.
Evaluation of Thin Film Coating Adhesion with Michelson Interferometer
Orchestra Room, Angelle Hall
An opto-acoustic technique has been applied to evaluate the adhesion strength of a thin-film (Au/Ti, Pt/Ti or Ti) coating on silicon wafers. The specimens have been configured with a Michelson Interferometer as the end mirrors, and are driven from rear with an acoustic transducer so that the specimen oscillates parallel to optical axis at frequencies ranging from 2 kHz – 30 kHz. The resulting film surface displacement has been detected as a fringe shift of the interference intensity pattern behind the beam splitter with a digital imaging system. The difference in adhesion strength between two types of specimens has been successfully visualized as the difference in the fringe contrast.