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The normal-incidence rotating-sample ellipsometer is an instrument that can be used to characterize grating surfaces from the measured ratio ρof complex reflection coefficients ry/rx of light polarized perpendicular and parallel to the grating groove direction. Experimental results at different wavelengths for different gratings with spatial frequencies from 150 to 5880 grooves/mm are presented. The groove depth of the 5880-grooves/mm gold-coated grating can be estimated from the measured ρ and rigorous grating theory.

Journal Name

Applied Optics


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