Document Type
Article
Publication Date
5-1-1996
Abstract
The normal-incidence rotating-sample ellipsometer is an instrument that can be used to characterize grating surfaces from the measured ratio ρof complex reflection coefficients ry/rx of light polarized perpendicular and parallel to the grating groove direction. Experimental results at different wavelengths for different gratings with spatial frequencies from 150 to 5880 grooves/mm are presented. The groove depth of the 5880-grooves/mm gold-coated grating can be estimated from the measured ρ and rigorous grating theory.
Journal Name
Applied Optics
Recommended Citation
Y. Cui and R. M. A. Azzam, "Applications of the normal-incidence rotating-sample ellipsometer to high- and low-spatial-frequency gratings," Appl. Opt. 35, 2235-2238 (1996)
Comments
This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-35-13-2235. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.