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One- and two-dimensional high-spatial-frequency dielectric surface-relief gratings on a Au substrate are used to design a high-reflectance quarter-wave retarder at 70° angle of incidence and 10.6-μm light wavelength. The equivalent homogeneous anisotropic layer model is used. It is shown that equal and high reflectances (>98.5%) for the p and the spolarizations and quarter-wave retardation can be achieved with two-dimensional ZnS surface-relief gratings. Sensitivities to changes of incidence angle, light wavelength, grating filling factor, and grating layer thickness are considered.

Journal Name

Applied Optics


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