Publication Date

8-18-1998

Date Filed

9-20-1996

Patent Number

5796098

Application Number

717548

Document Type

Patent

Department

Electrical Engineering

Abstract

Novel rotation sensors are disclosed. sensors with a temporal resolution of one measurement per rotation. A transparent or absorbing substrate can be coated with a transparent thin film to produce a linear response in reflectance versus angle of incidence over a certain range of angles. The best results were obtained when the incident light was s-polarized For example. a Si substrate coated with an SiO2 film was used in constructing a reflection rotation sensor. Experimental results and an error analysis of this rotation sensor are presented.

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