Document Type
Article
Publication Date
9-1-1994
Abstract
The modulated reflected and nonreflected light fluxes, measured as the azimuth of incident linearly polarized light is varied, yield the absolute reflectances Rp, and Rs, of a dielectric or semiconductor surface. Application to a reflective Si detector determines the refractive index and thickness of a SiO2 film on the detector surface.
Journal Name
Applied Optics
Recommended Citation
R. M. A. Azzam, "Polarized light reflectometer," Appl. Opt. 33, 6009-6011 (1994)
Comments
This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website:http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-33-25-6009. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.