Title
Spectral polarization measurements by use of the grating division-of-amplitude photopolarimeter
Document Type
Article
Publication Date
3-1-2003
Abstract
The grating division-of-amplitude photopolarimeter (G-DOAP) is an instrument that exploits the multiple-beam-splitting, polarizing, and dispersive properties of diffraction gratings for the time-resolved measurement of the complete state of polarization of collimated broadband incident light, as represented by the four Stokes parameters as a function of wavelength across the spectrum. It is a compact, high-speed sensor that has no moving parts and is simple to install and operate. These characteristics make the G-DOAP well suited for in situ spectroscopic ellipsometry (SE) applications for monitoring and controlling thin-film processes. The design and performance of a prototype instrument are presented. Precise SE measurements, to ±0.04° in ψ and ±0.1° in Δ, are demonstrated in the 550–940-nm wavelength range.
Journal Name
Applied Optics
Recommended Citation
Shankar Krishnan, Scott Hampton, James Rix, Brian Taylor, and Rasheed M. A. Azzam, "Spectral Polarization Measurements by Use of the Grating Division-of-Amplitude Photopolarimeter," Appl. Opt. 42, 1216-1227 (2003)
Comments
This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website:http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-42-7-1216. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.