Document Type

Article

Publication Date

1-15-1983

Abstract

The complex reflection coefficients Rv(ø,ζ) of a film-substrate system for the parallel (v = p) and perpendicular (v = s) polarizations are examined in detail as functions of the angle of incidence ø(0 ≤ ø ≤ 90°) and the reduced normalized film thickness ζ(0 ≤ ζ < 1). For definiteness, the reflection of light of wavelength λ = 0.6328 µm by the air–SiO2–Si system is assumed. Families of circles that represent the constant-angle-of-incidence contours, their envelopes, and the associated constant-thickness contours ofRp and Rs are all presented in the complex plane. Furthermore, the amplitude-reflectance and phase-shift functions, |Rv|(ø,ζ) and argRv(ø,ζ) are plotted vs ζ with ø constant and vs ø with ζ constant. It is shown that Rp or Rs can assume the same complex value at two different angles of incidence (i.e., the film-substrate system can have identical reflection characteristics for a given polarization at two angles) for certain ranges of film thickness. The distinct case of internal reflection is represented by a separate example.

Journal Name

Applied Optics

Comments

This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-22-2-253. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.

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